Charging effects of SiO<sub>2</sub> thin films under defocused electron beam irradiation
Acta Physica Sinica
Citation Search Quick Search
Acta Phys. Sin  2012, Vol. 61 Issue (2): 027302     doi:10.7498/aps.61.027302
CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES Current Issue| Archive| Adv Search  |   
Charging effects of SiO2 thin films under defocused electron beam irradiation
Li Wei-Qin1 2, Zhang Hai-Bo2, Lu Jun1
1. School of Automation and Information Engineering, Xi’an University of Technology, Xi’an 710048, China;
2. Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
Copyright © Acta Physica Sinica
Address: Institute of Physics, Chinese Academy of Sciences, P. O. Box 603,Beijing 100190 China
Tel: 010-82649294,82649829,82649863   E-mail: aps8@iphy.ac.cn