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| 超导转变边沿单光子探测器原理与研究进展 |
| 张青雅1 2, 董文慧1 2, 何根芳1 2, 李铁夫1 2, 刘建设1 2, 陈炜1 2 |
1. 清华大学, 清华信息科学与技术国家实验室, 北京 100084;
2. 清华大学微电子与纳电子学系, 微电子学研究所, 北京 100084 |
| Review on superconducting transition edge sensor based single photon detector |
| Zhang Qing-Ya1 2, Dong Wen-Hui1 2, He Gen-Fang1 2, Li Tie-Fu1 2, Liu Jian-She1 2, Chen Wei1 2 |
1. Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing 100084, China;
2. Institute of Microelectronics, Department of Micro/Nanoelectronics, Tsinghua University, Beijing 100084, China |
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摘要： 量子信息技术近十多年来的快速发展对单光子探测器的性能提出了更高的要求，高性能单光子探测器也因此受到了更多的关注. 与传统的单光子探测器相比，超导转变边沿（TES）单光子探测器在探测效率、能量分辨、光子数分辨和暗计数等方面具有突出优势. 目前，超导TES单光子探测器已经被成功地应用在量子光学实验和量子密钥分配系统中，未来在量子信息技术等研究领域具有更广泛的应用. 本文从超导TES单光子探测器的工作原理、制备流程、测试系统、主要性能指标以及研究现状和进展等方面对该探测器技术进行简要综述.
关键词：
量子信息
超导探测器
单光子探测器
超导转变边沿传感器
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Abstract： Over the past decade, there have been increasing demand on and interest in high performance single photon detectors in many new applications in quantum information technology. Compared with conventional single photon detectors, superconducting transition edge sensor (TES) based single photon detectors have great advantages in the performance of detection efficiency, energy resolution, photon number resolving capability, dark count rate, etc. They have been successfully used in quantum optics experiments and quantum key distribution systems, and they will play a more important role in the research field of quantum information science and technology. In this paper we review the operating principle, fabrication process, performance, measurement system and the research progress on superconducting TES based single photon detectors.
Keywords：
quantum information
superconducting detector
single photon detector
transition edge sensor
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收稿日期: 2014-04-27
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| PACS: |
03.67.-a
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(Quantum information)
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85.25.Pb
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(Superconducting infrared, submillimeter and millimeter wave detectors)
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07.20.Mc
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(Cryogenics; refrigerators, low-temperature detectors, and other low-temperature equipment)
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| 基金: 国家重点基础研究发展计划（批准号：2011CBA00304）和清华大学自主科研计划（批准号：20131089314）资助的课题. |
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2014, Vol. 63 
